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Combinatorial materials science strives to acceleratematerials discovery by producing and characterizingseveral compositions at once or in a high-throughputfashion. Thin films are ideal forcombinatorialstudies and several sputtering techniques exist forthe production of binary (2 components) or ternary (3components) films. Many new materials require morecomponents and there is a growing need forcombinatorial techniques allowing the explorationof quaternary materials (4 components). This bookdiscusses the advantages and disadvantages ofdiscrete versus continuous combinatorial sputteringtechniques for quaternaries and presents a method forsputtering combinatorial quaternary thin films alongwith experimental results. The visualization of datafrom quaternary thin films is also discussed andvisualization software is presented. This bookproposes solutions to the challenges faced whenconsidering quaternaries and should be useful tomaterials science researchers using thin filmcombinatorial methods.